【Granted Patent】Congratulations to Prof. Chang, Ting-Chang on the grant of U.S. patent for “ Method for reducing defects of electronic components by a supercritical fluid”
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Inventor |
Professor Chang, Ting-Chang |
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Department |
Department of Physics |
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Title |
Method for reducing defects of electronic components by a supercritical fluid |
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Patent No. |
US11,101,141B2 |
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Issued Date |
Aug. 24, 2021 |
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Abstract |
A method for reducing defects of an electronic component using a supercritical fluid includes recrystallizing and rearranging grains in the electronic component by introducing the supercritical fluid doped with H2S together with an electromagnetic wave into a cavity. The cavity has a temperature above a critical temperature of the supercritical fluid and a pressure above a critical pressure of the supercritical fluid.
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Contact Person |
Shu-Ying LIN(ext.2686) |
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